Ultra High Resolution Proportional Pressure Regulator

Electronic pressure regulator is an ideal solution for digitally regulating air pressure in industrial automation and process line.
QKL high resolution provides ultra resolution in cases where fine tuning of pressure is required, such as in various semiconductor manufacturing applications.

Related Applications

• Case study: liquid-phase TEM vacuum control

QKL-B1TR/QKL-B4HR is ultra high resolution electro-pneumatic proportional pressure control valves provides a step control of ±0.005% F.S., ideal for very sensitive applications. This series is a complete closed loop servo system consisting of two solenoid valves, an internal pressure transducer, and electronic controls.

A bleed orifice of 0.1mm (M5 exhaust) comes with this series. Based on input signal, the pressure is controlled by two solenoid valves and the bleed to maintain precise pressure; one valve functions as inlet control, the other as exhaust, and a constant bleed. This series features fast and high resolution pressure change. The pressure output is measured by an internal feedback pressure transducer that provides a feedback signal to the electronic controls. There are 3 selections of input signal and monitor signal: 0-10VDC, 4-20mA or RS485 ModBus.

All our products have CE, SGS, RoHS certification with ISO13485 quality system.